[8p-N101-1~14] 15.4 III-V-group nitride crystals

2:45 PM - 3:00 PM JST(5:45 AM - 6:00 AM UTC)

[8p-N101-6] Mechanism of polarity inversion in high-temperature AlN grown on nitridation sapphire

〇Yuki Kuwahara¹, Koki Fujii¹, Yuto Matsubara¹, Yukiya Hayashi¹, Soki Shimizu¹, Yuusuke Takashima^1,2, Yoshiki Naoi^1,2, Ken Matsumura³, Mirei Tokiwa⁴, Hidehiko Misaki⁴, Yoshihiro Ueoka⁴, Masami Mesuda⁴, Kentaro Nagamatsu^1,2,5 (1.Graduate School of Science and Technology for Innovation, Tokushima Univ., 2.pLED, Tokushima Univ., 3.Tosoh Analysis and Research Center Co., Ltd., 4.Tosoh Corporation, 5.IPHF, Tokushima Univ.)

Keywords:

AlN,polarity inversion,MOVPE