Presentation Information
[8p-N101-7]Investigation of the step-free surface of the terrace in AlN macro step by Ga surfactant effect
〇(D)Koki Fujii1, Yuto Matsubara1, Soichiro Iseki1, Yukiya Hayashi1, Yuki Kuwahara1, Soki Shimizu1, Yuusuke Takashima1,2, Yoshiki Naoi1,2, Kentaro Nagamatsu1,2,3 (1.G. S. Sci. Tech. Innovation, Tokushima Univ., 2.pLED, Tokushima Univ., 3.IPHF, Tokushima Univ.)
Keywords:
AlN,MOVPE