[8p-N102-1~6] Applications of quantum beams to semiconductor process and evaluation technologies

1:30 PM - 2:00 PM JST(4:30 AM - 5:00 AM UTC)

[8p-N102-1] New Frontiers in Advanced Semiconductor Characterization Enabled by SPring-8-II

〇Takaki Hatsui¹ (1.RIKEN)

Keywords:

analysis,non-destructive analysis,X-ray

SPring-8 is a world-leading synchrotron radiation facility that provides extremely bright X-rays for advanced research. It's upgrade to SPring-8-II is under progress. This presentation highlights preliminary results showing how SPring-8-II’s non-destructive X-ray techniques reveal nanoscale structures and strain in semiconductor devices, supporting next-generation innovation and industry growth.