[8p-N102-1~6] Applications of quantum beams to semiconductor process and evaluation technologies

3:50 PM - 4:20 PM JST(6:50 AM - 7:20 AM UTC)

[8p-N102-5] Cutting-edge Nanofabrication Equipment Using Electron and Ion Beams

〇Tatsuki Sugihara¹ (1.ELIONIX INC.)

Keywords:

electron beam,ion beam,nanofabrication

Since its founding in 1975, ELIONIX Inc. has been developing nanofabrication equipment and measurement/analysis instruments to contribute to advances in nanotechnology. In this presentation, we will provide a technical introduction to the electron beam lithography systems and ECR ion beam systems developed by ELIONIX. In addition, we will present our recent initiatives and application examples in response to growing demand.