[8p-PB1-1~14] 8.1 Plasma production and diagnostics

[8p-PB1-5] Simulation of Electron Temperature for a Xe Plasma using Plasma Hybrid Module

〇Hideki Masuda¹, Haruo Kasahara¹, Masaaki Tanaka², Koshi Ozama¹ (1.JEOL, 2.PEGASUS Software)

Keywords:

electron temperature,inductively coupled plasma

To use ions in plasma for semiconductor processes, a high ion density is required in the plasma as the light source. When the container that confines the plasma is small, (and the size of the space in which the plasma exists becomes small,) it becomes difficult to estimate the equilibrium state from the case of a larger space. Therefore, we used PHM to simulate the plasma space and investigated the relationship between electron temperature, gas density, and size.