Session Details

[8p-PB1-1~14]8.1 Plasma production and diagnostics

Tue. Sep 8, 2026 2:00 PM - 3:30 PM JST
Tue. Sep 8, 2026 5:00 AM - 6:30 AM UTC
PB1 (2nd Gymnasium)

[8p-PB1-2]Study on Impedance Changes in Dielectric Surface Barrier Discharge Plasma Sources Based on Discharge Area Analysis

〇Hisashi Koga1, Mao Oshimoto1, Tsuyoshi Nomiyama1, Tomohiro Kawahshima1, Takahiro Yamauchi2, Hirofumi Takikawa1 (1.Toyo Uni., 2.PIIF Kounou shien)

[8p-PB1-3]Numerical simulation of memory effects in atmospheric-pressure plasma jets

〇Ryusei Iwata1, Ippei Saito1, Tomoyuki Murakami1 (1.Seikei Univ.)

[8p-PB1-4]Improvement of a Cu Reaction Model for Self-Ionized Sputtering Simulation

〇Susumu Isono1, Shintaro Tamiya1, Masaya Watanabe1 (1.ULVAC, Inc.)

[8p-PB1-5]Simulation of Electron Temperature for a Xe Plasma using Plasma Hybrid Module

〇Hideki Masuda1, Haruo Kasahara1, Masaaki Tanaka2, Koshi Ozama1 (1.JEOL, 2.PEGASUS Software)

[8p-PB1-6]Spatial structure of an RF unbalanced magnetron plasma

〇(M2)Tomoya Mihara1, Yasunori Ohtsu1 (1.Saga Univ.)

[8p-PB1-7]Evaluation Method for Charge and Debye Screening Length of Microparticles Levitated in Plasma Sheath Using Optical Tweezers

〇Takuro Sugita1, Minghao Lou1, Daisuke Yamashita1, Takamasa Okumura1, Naho Itagaki1, Kazunori Koga1, Masaharu Shiratani1, Kunihiro Kamataki1 (1.Kyushu Univ. ISEE)

[8p-PB1-8]Loss Probabilities of Oxygen Atom on SiO2 Surfaces under Plasma Irradiation

〇Hayato Sato1, Takeda Keigo1 (1.Meijo Univ.)

[8p-PB1-9]Spatial structure of RF multi-hollow magnetized AZO sputtering plasma

〇Minoru Yamagata1, Yasunori Ohtsu1 (1.Saga Univ.)

[8p-PB1-11]High-density capacitively coupled hydrogen plasma
using hollow electrode with magnets built-in

〇(M1)Sora Matsuyoshi1, Yasunori Ohtsu1 (1.Saga Univ.)

[8p-PB1-13]Uniform target utilization by a rotating multi-ring-shaped RF magnetron sputtering plasma

〇Masato Komori1, Ohtsuy Yasunori1 (1.Saga Univ.)

[8p-PB1-14]Effect of target erosion distribution on RF magnetron sputtering plasma

〇Yusei Inoue1 (1.Saga Univ. Graduate School of Science and Engineering)