Presentation Information
[8p-PB3-10]Enhancing the uniformity of CVD-grown hBN using single-crystalline Fe-Ni foil
〇Yui Shimomura1, Takara Okonai1, Satoru Fukamachi1, Hiroki Ago1,2 (1.Kyushu Univ. IGSES, 2.Kyushu Univ. CSeDE)
Keywords:
hBN,CVD
Previously, Fe-Ni alloy foils have been used as catalyst metals in the CVD growth of hBN to achieve a well-balanced solid solution of both boron and nitrogen. However, the polycrystalline nature of these Fe-Ni foils has led to issues such as non-uniform hBN film thickness and the formation of grain boundaries within the hBN film due to mismatched grain orientations.
Therefore, in this research, we annealed Fe-Ni foils to transform them into single crystalline and investigated the subsequent effects on the multilayer hBN grown on their surface.
Therefore, in this research, we annealed Fe-Ni foils to transform them into single crystalline and investigated the subsequent effects on the multilayer hBN grown on their surface.