[8p-PB3-1~46] 17 Nanocarbon and Two-Dimensional Materials (Poster)

[8p-PB3-15] Raman spectroscopy study on MoS2 film prepared by vacuum heating of MoO3 film immersed in sulfur liquid

〇Taketo Kikuchi¹, Koki Nakane¹, Kazushi Inoue¹, Yui Aruga¹, Kazuhisa Sueoka¹, Eiji Hatta¹, Agus Subagyo¹ (1.Hokkaido Univ.)

Keywords:

molybdenum disulfide

To achieve monolayer MoS₂ fabrication, the effects of vacuum pressure and Mo film thickness in the vacuum heating method of MoO₃ thin films coated with liquid sulfur were evaluated using Raman spectroscopy. At 1x10^₃ Pa, few-layer MoS₂ was formed regardless of the film thickness. Conversely, under a higher vacuum of 1 Pa, MoS₂ was formed only on the 4 nm patterns and not from the 1 nm thin film, demonstrating the dependence of growth on vacuum pressure and film thickness.