[8p-PB3-1~46] 17 Nanocarbon and Two-Dimensional Materials (Poster)

[8p-PB3-16] Study on electrical properties of MoS2 fabricated by the sulfurization process

〇Yui Aruga¹, Koki Nakane¹, Taketo Kikuchi¹, Kazushi Inoue¹, Eiji Hatta¹, Kazushi Sueoka¹, Agus Subagyo¹ (1.Hokkaido Univ.)

Keywords:

molybdenum disulfide,two-dimensional materials

This study fabricated TLM electrodes on MoS₂ patterns to evaluate the electrical conduction properties of MoS₂ formed by a direct sulfurization method via vacuum heating of a pre-formed sulfur film on a MoO₃ film. As a result of measurements conducted using Ti as the source/drain electrodes and a Si substrate as the back-gate electrode, the current values were found to be small in most devices, except for a few that exhibited transistor characteristics. This is considered to be an issue arising from the large junction resistance with the Ti electrode.