Presentation Information
[8p-PB3-9]Direct Growth of h-BN on Ferroelectric Substrates Using Permalloy Catalysts
〇Takuto Inaba1, Shinichiro Mouri1, Abdul Kuddus2 (1.Ritsu Univ., 2.R-GIRO)
Keywords:
h-BN,Ferroelectric,CVD
Direct growth of h-BN on ferroelectric substrates was investigated for applications in ferroelectric devices based on atomically thin materials. A Permalloy (Ni-Fe alloy) thin film was formed on a lithium niobate (LN) substrate as a catalyst, and h-BN was grown at 900℃ by chemical vapor deposition (CVD) using ammonia borane as a precursor. Raman spectroscopy measurements revealed a peak near 1370 cm-1 corresponding to the E2g vibrational mode of h-BN in the Permalloy-catalyzed region, confirming the presence of h-BN. In the presentation, the results of detailed microstructural characterization and a comparison with samples prepared using Ni catalysts will be reported.