[9a-PB2-1~15] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[9a-PB2-5] Hydrogen Selectivity of a QCM-Type Hydrogen Sensor Coated with Amorphous Carbon Films

〇(M1)Yusuke Oshima¹, Yasushi Ishiguro², Alanazi Ali³, Kenji Hirakuri¹, Kazuya Kanasugi¹ (1.Tokyo Denki Univ., 2.National Defense Acad, 3.King Saud Univ)

Keywords:

Amorphous Carbon,Quartz crystal microbalance