[9a-PB2-1~15] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[9a-PB2-7] Effect of Dilution Gas on Characteristics of CO Plasma for Hydrogen-Free DLC Films Deposition

〇(M2)Mizuki Sato¹, Toru Harigai², Hiroyuki Kousaka², Akinori Oda¹ (1.Chiba Tech., 2.Gifu Univ.)

Keywords:

diamond-like carbon,plasma CVD,simulation