[9a-PB2-1~15] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[9a-PB2-9] Control of Titanium Surface Oxidation by Hydrogen-Added Atmospheric Pressure Non-Equilibrium RF Plasma and Its Application to Direct Ti/PEEK Bonding

〇Kosuke Takenaka¹, Kouki Ueno¹, Giichiro Uchida², Yuichi Setsuhara¹ (1.Univ. Osaka, 2.Nagoya Univ.)

Keywords:

Reduction of metal oxides,Dissimilar material bonding