[9p-A22-1~12] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

2:00 PM - 2:15 PM JST(5:00 AM - 5:15 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[9p-A22-1] Spatial resolution demonstration for Si-based stacked film analysis by IR near-field light

〇(D)Ryoga Odawara¹, Yasuo Shimizu², Koichiro Saga², Yukio Kawano^1,3,4 (1.Chuo Univ., 2.Sony Semiconductor Solutions Corporation, 3.NII, 4.KISTEC)

Keywords:

semiconductor,scannning near-field optical microscopy,Infrared light imaging