[9p-A22-1~12] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

4:15 PM - 4:30 PM JST(7:15 AM - 7:30 AM UTC)

[9p-A22-9] Numerical Study of the Roughness-Limited Mean Free Path in Multimode Semiconductor Nanosheets

〇Yuta Yamada¹, Nobuya Mori¹ (1.UOsaka)

Keywords:

nanosheet,surface roughness

A quantitative understanding of the impact of roughness scattering on carrier transport in semiconductor nanosheets is important, and numerous studies have been conducted mainly based on perturbation theory. On the other hand, as a non-perturbative approach, a method has also been proposed to extract the mean free path from quantum transport simulations of single-mode nanosheets. In this study, aiming at application to more realistic device sizes, we investigated the development of a computational method applicable to multimode nanosheets with multiple propagating modes.