Presentation Information
[9p-B31-1]Opening Remarks: Plasma and Carbon-Based Thin Films
〇Toru Harigai1 (1.Gifu Univ.)
Keywords:
Plasma process,Carbon-based thin film,Quantum Sensor
Carbon-based thin films, particularly diamond and diamond-like carbon (DLC), are becoming increasingly important in a wide range of fields, including thermal management materials, electronic devices, quantum sensors, and biomedical applications. The properties and performance of these materials strongly depend on structural formation and interfacial states during film growth, the origins of which lie in the generation, transport, and reactions of active species in plasma processes. This presentation introduces the motivation and objectives of this symposium, which aims to provide a common perspective linking plasma science and carbon-based thin films and to promote interdisciplinary discussions across related research fields.
