The 87th JSAP Autumn Meeting 2026
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Session Details

Symposium (Oral)Symposium : Active Species Control, Interface Formation, and Functionalities: Perspectives Connecting Plasma and Carbon-Based Thin Films

[9p-B31-1~8]Active Species Control, Interface Formation, and Functionalities: Perspectives Connecting Plasma and Carbon-Based Thin Films

Wed. Sep 9, 2026 1:30 PM - 5:45 PM JST
Wed. Sep 9, 2026 4:30 AM - 8:45 AM UTC
B31 (Faculty of Engineering B Block)
1:30 PM - 1:40 PM JST(4:30 AM - 4:40 AM UTC)

[9p-B31-1]Opening Remarks: Plasma and Carbon-Based Thin Films

〇Toru Harigai1 (1.Gifu Univ.)
1:40 PM - 2:10 PM JST(4:40 AM - 5:10 AM UTC)

[9p-B31-2]Understanding Carbon Material Formation Mechanisms through Reactive Species Diagnostics and Machine Learning

〇Hiroki Kondo1, Yusuke Ando2, Naoki Ueoka2, Kenji Ishikawa3, Takayoshi Tsutsumi3, Masaru Hori3, Mineo Hiramatsu4, Yutaka Matsuo2 (1.Kyushu Univ., 2.Nagoya Univ., 3.Nagoya Univ., Plasma, 4.Meijo Univ.)
2:10 PM - 2:40 PM JST(5:10 AM - 5:40 AM UTC)

[9p-B31-3]Growth of ultranano-crystalline diamond at low temperature by 13.56MHz inductively coupled plasma CVD method

〇Ryota Ando1, Satoru Nagamachi1, Natsuo tatsumi1 (1.SEI)
2:40 PM - 3:10 PM JST(5:40 AM - 6:10 AM UTC)

[9p-B31-4]Plasma Processing for Preparation of Diamond Wafers

〇Hideaki Yamada1 (1.ASIT)
4:05 PM - 4:35 PM JST(7:05 AM - 7:35 AM UTC)

[9p-B31-5]Challenges of Carbon hard mask in Semiconductor Processes

〇Kohei Yazaki1 (1.Tokyo Electron Ltd.)
4:35 PM - 5:05 PM JST(7:35 AM - 8:05 AM UTC)

[9p-B31-6]Interfacial Design and Emergent Functionalities in Carbon-Based Materials

〇Yuki Hirata1 (1.Science Tokyo)
5:05 PM - 5:35 PM JST(8:05 AM - 8:35 AM UTC)

[9p-B31-7]Diamond Integrated Quantum Sensors Enabled by Plasma Nanofabrication

〇Ryota Katsumi1,2,3 (1.TUT, 2.Columbia Univ., 3.Univ. of Tokyo)
5:35 PM - 5:45 PM JST(8:35 AM - 8:45 AM UTC)

[9p-B31-8]Closing

〇Yuki Katamune1 (1.Kyutech)
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