[9p-E208-1~11] 7.3 Micro/Nano patterning and fabrication

4:15 PM - 4:30 PM JST(7:15 AM - 7:30 AM UTC)

[9p-E208-11] Fabrication of Anti-Reflective Self-Supporting Metal Films Using Soluble UV-Curable Resins.

〇TAICHI OGAWA¹, Jun Taniguchi¹ (1.Tokyo Univ. of Sci.)

Keywords:

nanoimprint,molds,plasmon

By incorporating a moth-eye structure into a freestanding metal thin film that is not constrained by a substrate, it is possible to fabricate a moth-eye metal thin film with good release properties. Furthermore, due to synergistic effects with the metal’s surface plasmon properties, high anti-reflection performance is expected across a broad wavelength range from visible light to the near-ultraviolet. In this study, we attempted to fabricate freestanding metal thin films with a moiré pattern using UV nanoimprint lithography with a soluble UV-curable resin (PAK-YY01, Toyo Synthetic Industries).