Presentation Information
[9p-E311-14]Growth and crystal structure analysis of AlYN layers grown by MOCVD
〇Shun Narita1, Yudai Shimizu1, Daisuke Iida1, Keitaro Ikejiri1, Kazutada Ikenaga1 (1.Nippon Sanso Corp.)
Keywords:
AlYN,nitride semiconductor,MOCVD
