Presentation Information

[9p-E311-14]Growth and crystal structure analysis of AlYN layers grown by MOCVD

〇Shun Narita1, Yudai Shimizu1, Daisuke Iida1, Keitaro Ikejiri1, Kazutada Ikenaga1 (1.Nippon Sanso Corp.)

Keywords:

AlYN,nitride semiconductor,MOCVD