[9p-E311-1~21] CS.7 Code-sharing session of 6.1 & 15.4

5:15 PM - 5:30 PM JST(8:15 AM - 8:30 AM UTC)

[9p-E311-15] Epitaxial Growth of BAlN Films on SiC Substrates by Sputtering

〇Kazuhisa Ikeda¹, Yuto Shibuya¹, Atsushi Kobayashi¹ (1.Tokyo Univ. of Science)

Keywords:

semiconductor,nitride semiconductor,sputtering