[9p-E311-1~21] CS.7 Code-sharing session of 6.1 & 15.4

5:30 PM - 5:45 PM JST(8:30 AM - 8:45 AM UTC)

[9p-E311-16] Growth temperature dependence of structural properties of sputter-grown NbAlN films on GaN

〇Souta Kurogi¹, Misato Tsuji², Riku Kikuchi¹, Kazuhisa Ikeda^1,2, Atsushi Kobayashi^1,2 (1.Grad. School of Tokyo Univ. of Science, 2.Tokyo Univ. of Science)

Keywords:

NbAlN,Sputtering,Epitaxy