Presentation Information
[9p-E311-18]Investigation of electric-filed-induced polarity inversion
in single-crystal AlN films deposited by selective growth
〇Takashi Kimura1, Koji Terumoto1, Yoshiaki Oku1 (1.ROHM Co., Ltd.)
Keywords:
aluminum nitride,AlN,single crystal
For the development of high-frequency and high-power-handling BAW resonators, polarity control of single-crystal piezoelectric films is an important technology for realizing polarization-inverted structures. In this study, we investigated the possibility of polarity inversion in single-crystal AlN films by applying an electric field. After electric-field application, changes in the surface morphology suggesting a change in polarity were confirmed by etching evaluation.<!--ScriptorStartFragment-->This presentation reports the results of polarity determination before and after electric-field application and discusses polarity control in single-crystal AlN films toward the realization of polarization-inverted devices.