Presentation Information
[9p-E311-5]Microstructural characterization of ScAlN thin film by 4D-STEM cepstrum matching
〇Kodai Niitsu1, Kenji Hirata2, Katsuaki Nakazawa1, Kazutaka Mitsuishi1, Sri Ayu Anggraini2, Masato Uehara2, Morito Akiyama2 (1.NIMS, 2.AIST)
Keywords:
4D-STEM,ScAlN,Piezoelectricity
ScAlN thin films are attracting attention as next-generation piezoelectric and ferroelectric materials due to their excellent piezoelectric properties and ferroelectric characteristics. In particular, improving piezoelectric properties requires the solid solution of high concentrations of Sc, but it is known that increasing the amount of solid solution leads to problems such as a decrease in crystallinity and c-axis texture, and the formation of heterogeneous phases. In this study, we obtained areal CBED (convergent-beam electron diffraction) patterns of the cross-sectional structure of ScAlN thin films using 4D-STEM, performed cepstrum treatment, and then performed template matching to identify the crystal structure and crystal orientation, and investigated the structural distribution and interphase lattice correspondence.