Presentation Information
[9p-E311-8]Characterization of leakage current and photocurrent in ScAlN/GaN grown by PA-MBE
〇Kosuke Joya1, Kouei Kubota1, Hikaru Sasaki1, Ryosho Nakane1, Takuya Maeda1 (1.UTokyo)
Keywords:
ScAlN,PA-MBE,photocurrent
ScAlN exhibits a wide bandgap, a large piezoelectric response, strong spontaneous polarization, and ferroelectricity, making it a promising material for realizing new functionalities through integration with GaN devices. Although ferroelectricity in ScAlN/GaN structures has been demonstrated using several crystal growth methods in recent years, reports on MBE-grown ScAlN/GaN structures remain limited. In this study, we fabricate ScAlN/GaN heterostructures by PA-MBE and investigate their structural properties, leakage current characteristics, and photocurrent characteristics.
