Presentation Information
[9p-N101-16]Evaluation of Contact Characteristics on Low-Temperature-Grown p-GaN Toward High-Efficiency Nitride-Based Red LEDs
〇Yuki Oba1, Ritsuki Ninomiya1, Ai Sakakibara1, Minori Kinoshita1, Satoshi Kamiyama1, Tetsuya Takeuchi1, Motoaki Iwaya1, Kazumasa Niwa2, Atsushi Suzuki2 (1.Meijo University, 2.E&E Evolution Ltd.)
Keywords:
low-temperature-grown p-GaN,contact resistance
In this study, to extract academic bottlenecks in contact formation on low-temperature-grown (LT) p-GaN, Ni/APC electrodes were deposited on LT-p-GaN with varying Cp2Mg concentrations, followed by C-TLM and I-V measurements. Although increasing the Cp2Mg flow rate reduced the contact resistance on LT-p-GaN, the values remained three to five orders of magnitude higher than those of conventional high-temperature-grown p-GaN. These results suggest that contact formation on LT-p-GaN is involved with a decrease in Mg activation efficiency and degradation of crystal quality, indicating that essential challenges unique to low-temperature growth still remain.
