[9p-N101-1~16] 15.4 III-V-group nitride crystals

2:30 PM - 2:45 PM JST(5:30 AM - 5:45 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[9p-N101-5] Ohmic Contact Formation on Al-Rich AlGaN Using a Graded Layer

〇Riku Ando¹, Ryota Akaike^1,2, Hiroki Yasunaga^2,3, Narihiko Maeda⁴, Hideto Miyake^1,2 (1.Grad. Sch. of Eng. Mie Univ., 2.IC-SDF Mie Univ., 3.ORIP Mie Univ., 4.Tokyo Univ. of Technology)

Keywords:

selective regrowth,Al rich AlGaN,TEM