The 87th JSAP Autumn Meeting 2026
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Tue. Sep 8, 2026
Wed. Sep 9, 2026
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[9p-PA1-24]
Structural Analysis of Damage Induced by FIB processing in
b
-Ga
2
O
3
substrate
〇SHOHEI HAYASHI
1
, Ai Hashimoto
1
, Naohiko Kawasaki
1
(1.Toray Research Center Inc.)
Keywords:
Ga2O2,FIB,TEM
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