Presentation Information
[9p-PA1-25]Evaluation of dissolution behavior of β-Ga2O3 using electrolyzed water
〇Aoi Otsuka1, Taro Tsukada1, Toshinori Taishi1 (1.Shinshu Univ.)
Keywords:
gallium oxide,etching,electrolyzed water
gallium oxide,etching,electrolyzed water