Presentation Information

[9p-PA1-32]Improvement of PBS Stability in Amorphous IGZO TFTs by Non-Thermal Treatment

〇Koga Nakamura1, Ko Ishihara1, Yoshikazu Shin1, Shinya Aikawa1 (1.Kogakuin Univ.)

Keywords:

a-IGZO TFT,Non-Thermal Treatment