Presentation Information
[9p-PA1-33]Threshold Voltage Control of Room-Temperature Fabricated a-IGZO TFTs
Using SiO2/Y2O3 Stacked Passivation Layers
〇Ko Ishihara1, Koga Nakamura1, Yuya Yasaki1, Shinya Aikawa1 (1.Kogakuin Univ.)
Keywords:
a-IGZO TFT,multilayer passivation,threshold voltage control
