Presentation Information

[9p-PA1-33]Threshold Voltage Control of Room-Temperature Fabricated a-IGZO TFTs
Using SiO2/Y2O3 Stacked Passivation Layers

〇Ko Ishihara1, Koga Nakamura1, Yuya Yasaki1, Shinya Aikawa1 (1.Kogakuin Univ.)

Keywords:

a-IGZO TFT,multilayer passivation,threshold voltage control