Presentation Information
[9p-PA1-35]Fabrication and Evaluation of TFT type CO2 Gas Sensors with Polar (100) Surfaces Preferentially Grown by Water Vapor Introduced Sputtering
〇(M1)Tomohiro Sakai1, Yuichiro Ebisawa1, Jeongmin Shin2, JinHyeok Cha2, Tomohiro Yamaguchi1, Shinya Aikawa1 (1.Kogakuin Univ., 2.Chonnam Univ.)
Keywords:
thin-film transistor (TFT),CO2 sensor,polycrystalline
In this study, In2O3 thin-film transistor (TFT)-type CO2 sensors were fabricated by controlling the water vapor partial pressure during deposition, and the effects on polar (100) surface formation, TFT operation, and CO2 sensing properties were investigated. GI-XRD analysis revealed preferential growth of the polar (100) surface at water vapor partial pressures of 1×10−3 Pa or higher. In particular, the device fabricated at 1×10−3 Pa exhibited favorable transfer characteristics. These results indicate that a water vapor partial pressure of 1×10−3 Pa is an appropriate deposition condition for low-temperature CO2 detection.