Presentation Information
[9p-PA1-43]Polar Surface Control of In2O3 TFT-Based Gas Sensors for High-Sensitivity CO2
〇(M2)Yuichiro Ebisawa1, Haruki Ishikawa1, Tomohiro Sakai1, Shin Jeongmin2, JinHyeok Cha2, Tomohiro Yamaguchi1, Shinya Aikawa1 (1.Kogakuin Univ., 2.Chonnam National Univ.)
Keywords:
CO2 gas sensor,crystal orientation,thin-film transistor
Toward room-temperature operation and high sensitivity of In2O3 TFT-based CO2 sensors, we focused on the polar In2O3(100) surface. By controlling the back pressure in RF sputtering, we tuned the crystal orientation and investigated its correlation with CO2 sensitivity. XRD, XPS, and TFT characterization revealed that the polar surface promotes adsorption of oxygen-derived ionic species, enhancing sensitivity. Under conditions favoring (100) growth, sensitivity improved more than sixfold. Detection characteristics under diluted conditions will also be reported.