[9p-PA1-1~52] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[9p-PA1-5] Control of nanoparticle dispersion in source solutions for mist CVD of nanoparticle-dispersed semiconductor thin films

〇Rio Tanigawa¹, Hiroto Ujiie¹, Hina Saito¹, Tetsuya Kouno¹, Hiroko Kominami¹, Kazuhiko Hara^1,2,3 (1.GSIST, Shizuoka Univ., 2.CMMP, Shizuoka Univ., 3.RIE, Shizuoka Univ.)

Keywords:

mist CVD,Zinc oxide