Presentation Information

[9p-PA1-6]Effect of HCl on Growth of Sn-doped α-Ga2O3 by Mist CVD Method

〇Nishio Soma1, Iida Ryuma1, Ishikawa Haruki1, Nakahachi Hinata1, Terukina Asato1, Ota Chisato1, Aikawa Shinya1, Nagai Hiroki1, Onuma Takeyoshi1, Honda Tohru1, Yamaguchi Tomohiro1 (1.Kogakuin Univ.)

Keywords:

thin film growth,Mist CVD,Ga2O3