[9p-PA1-1~52] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[9p-PA1-9] Effect of acetic acid addition on mist CVD of (Zn,Mg)O and Ga₂O₃ films

〇Hiroto Ujiie¹, Hina Saito¹, Rio Tanigawa¹, Tetsuya Kouno¹, Hiroko Kominami¹, Kazuhiko Hara^1,2,3 (1.Shizuoka Univ., 2.Medical Photonics., 3.Elec.Res.Inst.)

Keywords:

mist CVD,gallium oxide,zinc oxide