The 87th JSAP Autumn Meeting 2026

8 Plasma Electronics : 8.2 Plasma deposition of thin film, plasma etching and surface treatment

Oral presentation

[8a-B11-1~13]8.2 Plasma deposition of thin film, plasma etching and surface treatment

Tue. Sep 8, 2026 9:00 AM - 12:30 PM JST
Tue. Sep 8, 2026 12:00 AM - 3:30 AM UTC

B11 (Faculty of Engineering B Block)

Chair : Kosuke Takenaka(Osaka Univ.), Haruka Suzuki(Nagoya Univ.)

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Oral presentation

[8p-B11-1~16]8.2 Plasma deposition of thin film, plasma etching and surface treatment

Tue. Sep 8, 2026 2:00 PM - 6:30 PM JST
Tue. Sep 8, 2026 5:00 AM - 9:30 AM UTC

B11 (Faculty of Engineering B Block)

Chair : Kazunori Shinoda(Hitachi High-Tech), Shih-Nan Hsiao(Nagoya University)

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Poster presentation

[9a-PB2-1~15]8.2 Plasma deposition of thin film, plasma etching and surface treatment

Wed. Sep 9, 2026 9:00 AM - 10:30 AM JST
Wed. Sep 9, 2026 12:00 AM - 1:30 AM UTC

PB2 (2nd Gymnasium)

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