The 87th JSAP Autumn Meeting 2026

KS Sessions organized by JSAP's Professional Group : KS5 Atomic Layer Process Group

Oral presentation

[10a-N102-1~9]KS5 Atomic Layer Process Group

Thu. Sep 10, 2026 9:00 AM - 12:00 PM JST
Thu. Sep 10, 2026 12:00 AM - 3:00 AM UTC

N102 (First Year Education Bld. N Block)

Chair : Kenji Ishikawa(Nagoya Univ.), Yukihiro Shimogaki(Univ. of Tokyo)

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Oral presentation

[10p-B12-1~7]KS5 Atomic Layer Process Group

Thu. Sep 10, 2026 2:00 PM - 3:45 PM JST
Thu. Sep 10, 2026 5:00 AM - 6:45 AM UTC

B12 (Faculty of Engineering B Block)

Chair : Takeshi Momose(Kumamoto Univ.)

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