[15a-M_135-1~9] 1.6 Ultrasonics

11:00 AM - 11:15 AM JST(2:00 AM - 2:15 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[15a-M_135-6] Growth of Epitaxial AlN Film Using "Multi-functional^® interlayer" and Evaluation of Their BAW Characteristics.

〇(B)Hideaki Gommori¹, Masashi Suzuki¹, Shoji Kakio¹, Masashi Seki², Takeshi Kijima² (1.Univ. of Yamanashi, 2.Gaianixx)

Keywords:

AlN film,epitaxial growth