[15a-M_135-1~9] 1.6 Ultrasonics

11:15 AM - 11:30 AM JST(2:15 AM - 2:30 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[15a-M_135-7] Polarity Inverted Si_0.1Sc_0.3AlN/Sc_0.3AlN Film BAW Resonators Operating at 5 GHz

〇(B)Masato Hijikata¹, Masashi Suzuki¹, Shoji Kakio¹, Sri Ayu Anggraini² (1.Univ. of Yamanashi, 2.AIST)

Keywords:

AlN film,Polarity Inverted Structure,BAW Resonators