[15a-M_135-1~9] 1.6 Ultrasonics

11:30 AM - 11:45 AM JST(2:30 AM - 2:45 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[15a-M_135-8] Second-overtone Mode BAW Resonators Operating at 10 GHz Using Polarity-inverted ScAlN/SiAlN Films

〇(B)Hiroto Honda¹, Masashi Suzuki¹, Shoji Kakio¹ (1.Univ. Yamanashi)

Keywords:

ScAlN Film,BAW device