[15a-M_135-1~9] 1.6 Ultrasonics

11:45 AM - 12:00 PM JST(2:45 AM - 3:00 AM UTC)

[15a-M_135-9] Evaluation of Al₂O₃ and SiO₂ Thin Films for Acoustic Reflective Multilayer Film

〇Yuji Ohashi¹, Jun-ichi Kushibiki², Kentaro Totsu², Kazuki Yokoo³, Shota Jin³, Takahiro Ito³ (1.Akita Pref. Univ., 2.Tohoku Univ., 3.GEOMATEC)

Keywords:

acoustic reflective multilayer films,SMR-type acoustic wave filters,leaky surface acoustic wave velocity

To establish an evaluation platform for acoustic reflective multilayer films used in SMR-type acoustic wave filters, single-layer Al₂O₃ and SiO₂ films were fabricated, and thin-film characterization was performed based on the leaky surface acoustic wave (LSAW) velocity. By applying RF bias during sputter deposition, the surface roughness was reduced, and a clear change in the LSAW velocity was detected.