Presentation Information
[15a-PA5-4]Deposition of Silicon Nitride Films by Cat-CVD on Silicon Heterojunction Solar Cells
〇Lin Guo1, Kensaku Maeda1, Keisuke Ohdaira1 (1.JAIST)
Keywords:
Cat-CVD,Silicon Heterojunction Solar Cell
By depositing a SiNx film on the surface of a silicon heterojunction solar cell using the Cat-CVD method, the influence of the film deposition on the electrical performance was investigated. A comparison of the J–V characteristics and EQE spectra before and after deposition showed no significant degradation in output performance. These results confirm that SiNx deposition on SHJ solar cells by Cat-CVD can be carried out while maintaining device performance.