[15a-S2_202-1~10] CS.1 Code-sharing Session of 2.3 & 7.4

11:30 AM - 11:45 AM JST(2:30 AM - 2:45 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[15a-S2_202-10] Etching effects at cryogenic temperatures induced by GCIB irradiation in reactive gas
environments

〇(M1)Seiya Kitanaka¹, Taichi Ito¹, Takeuchi Masaya¹, Toyoda Noriaki¹ (1.Univ of Hyogo)

Keywords:

GCIB,cryo etching