[15a-S2_202-1~10] CS.1 Code-sharing Session of 2.3 & 7.4

11:00 AM - 11:15 AM JST(2:00 AM - 2:15 AM UTC)

[15a-S2_202-8] Acceleration voltage dependence of molecular damage by Ar-GCIB sputtering using mono-disperse mPEG

〇(M2)Yuri Mizutani¹, Jiro Matsuo¹, Toshio Seki¹ (1.Kyoto Univ.)

Keywords:

secondary ion mass spectrometry,cluster ion beam