[15a-W9_323-1~5] 22.1 Joint Session M "Phonon Engineering"

10:45 AM - 11:00 AM JST(1:45 AM - 2:00 AM UTC)

[15a-W9_323-2] Fabrication and design optimization of in-plane integrated SiN membrane devices

〇Kohki Nomura¹, Meguya Ryu¹, Massimiliano Zamengo¹, Junko Morikawa¹ (1.Science Tokyo)

Keywords:

Thermal property

The in-plane thermal properties of nano-thin films are based on highly sensitive measurements that suppress heat dissipation in the out-of-plane direction and minimize the influence of the sample support substrate. In this study, we fabricated a sensor device with a SiN thin film as a support substrate. We measured the in-plane thermal diffusivity of the nano-thin films using TWA method for the fabricated device. In order to investigate the effect of the structural design of the thermal device on nanoscale in-plane thermal diffusivity measurements, a simulation of the device's temperature distribution using the finite element method was carried out.