Presentation Information
[15a-WL1_301-11]Development of High-Sensitivity Filter-Free Wavelength Sensor with PG-Free Structure
〇Ryoma Mibu1, Yong-Joon Choi1, Tomoya Ide1, Yasuyuki Kimura1, Yoshiko Noda1, Daisuke Akai1, Takeshi Hizawa1, Toshihiko Noda1, Kazuhiro Takahashi1, Kazuaki Sawada1 (1.Toyohashi Univ. of Tech.)
Keywords:
filter-free wavelength sensor,optical sensor,high sensitivity
The PG structure of the filter-free wavelength sensor developed by our research group had an issue of low light-receiving sensitivity due to light absorption by the Poly-Si electrode material. In this study, we propose a new PG-free structure that generates a potential peak through voltage application to an n-type doping layer and IFD electrode without using a PG electrode. This achieved sensitivity improvements of approximately 2.3 times for 470 nm light and 2.0 times for 660 nm light while maintaining wavelength discrimination capability. Application to high-precision on-site measurements is expected.
