[15a-WL1_301-1~11] 12.7 Biomedical Engineering and Biochips

10:45 AM - 11:00 AM JST(1:45 AM - 2:00 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[15a-WL1_301-7] Design and Fabrication of a CMOS Odor Sensor with an Electrode Structure Focusing on Electric Field Distribution

〇Yoshihiro Asada¹, Yoshiko Noda¹, Daisuke Akai¹, Takeshi Hizawa¹, Yasuyuki Kimura¹, Ik-Hyun Kwon¹, Yong-Joon Choi¹, Kazuhiro Takahashi¹, Kazuaki Sawada¹, Toshihiko Noda¹ (1.Toyohashi Univ. of Tech.)

Keywords:

Odor Sensor,Electric field distribution

Odor information consists of highly diverse chemical components, making it difficult for conventional selective sensors to handle comprehensively. In this study, we focus on the electric field distribution formed by electrode structures in a CMOS-based odor sensor and propose an L-shaped electrode configuration that enables the electric field to be distributed over a wider area of the sensing membrane. Numerical simulations demonstrate that the effective region where the electric field acts on the sensing membrane is expanded by 148% compared with a conventional structure. Based on this design, a CMOS odor sensor chip implementing the proposed electrode structure was designed and fabricated.