Presentation Information
[15a-WL2_101-1]Proof-of-Concept Demonstration of an Integrated Temperature Sensor Sheet Based on Phase-Transition Oxides
〇(M2C)Kosuke Kayano1, Sang-Gyu Koh2, Satoshi Hamasuna1, Shiyuan Sun1, Takaaki Miyasako2, Tadasu Hosokura2, Takeaki Yajima1 (1.Kyushu University, 2.Murata Manufacturing Co., Ltd.)
Keywords:
oxide phase-transition materials,PTC thermistor (positive temperature coefficient thermistor),BaTiO3 (barium titanate)
Oxide phase-transition materials exhibit high temperature sensitivity in resistance, which we exploit to propose an integrated temperature-distribution sensor sheet achieving high noise robustness, high-speed operation, and low energy consumption simultaneously. By using the phase-transition-induced resistance change as a threshold response, we show that large-scale integration is feasible even under wiring parasitics and noise. We fabricated a 1024-sensor flexible sheet using BaTiO3-based PTC thermistors and verified temperature-distribution sensing in combination with a readout circuit chip.
