[15a-WL2_101-1~10] 6.3 Oxide electronics

9:45 AM - 10:00 AM JST(12:45 AM - 1:00 AM UTC)

[15a-WL2_101-4] Evaluation of electrical properties of oxide semiconductor WO₃ nanoparticles using nanogap electrodes and their applications to gas sensors

〇(M2)Ryo Fujioka¹, Sanae Murayama², Hiroyasu Yamahara¹, Yuki Komoto², Sankar Ganesh Ramaraj¹, Masateru Taniguchi², Hitoshi Tabata¹ (1.Univ. of Tokyo, 2.Univ. of Osaka)

Keywords:

Gas sensor,Nanogap,Oxide semiconductor nanoparticles

Aiming to realize high-sensitivity gas sensors for healthcare, we developed and evaluated a device combining nanogap electrodes and WO₃ nanoparticles. AC impedance measurements of the acetone response across gap widths of 30–100 nm confirmed that the internal resistance components of the nanoparticles vary in a concentration-dependent manner. The 30 nm gap showed the highest sensitivity, suggesting that the reduction in the number of measured particles allows for the effective extraction of minute changes.