[15a-WL2_301-1~9] 3.7 Optical measurement, instrumentation, and sensor

10:45 AM - 11:00 AM JST(1:45 AM - 2:00 AM UTC)

[15a-WL2_301-5] Evaluation of Laser Processing Using Industrial TD-OCT

〇Hitoshi Hitoshi Tsukamoto¹, Shiina Tatsuo¹ (1.Chiba Univ.)

Keywords:

OCT,Laser Processing

In the precision machinery industry, high-quality laser processing has become mainstream, and the importance of defect inspection and process control is increasing. Optical Coherence Tomography (OCT) is a technology that enables high-resolution, non-destructive, real-time observation of processing processes; however, existing systems are expensive and have limited flexibility in optical system design and measurement range. In this study, we focus on Time-Domain OCT (TD-OCT), which offers high design flexibility, and develop an industrial TD-OCT specialized for process monitoring. Coaxial and synchronized laser processing and OCT measurements were performed, and the effectiveness of the proposed system was evaluated.